產(chǎn)品留言

一、晶圓尺寸：150 和 200 mm

ThermoChuck 型號(hào)	溫度范圍°C	冷卻	加熱
TP03000A	-65 to +200°C	Mechanical refrigeration, closed loop liquid cooling	熱電
TP03010A	+20 to +200°C	風(fēng)冷/水冷*	熱電
TP03010B	0 to +200°C	Closed loop glycol/water cooling	熱電
TP03015A	+30 to +200°C    (+300oC optional)	風(fēng)冷/水冷*	電阻
TP03015B	+30 to +200°C   (+300°C optional)	Closed loop glycol/水冷	電阻

電壓 115V或 220V

* 用戶提供冷卻介質(zhì)




二、晶圓尺寸：300 mm

ThermoChuck 型號(hào)	溫度范圍°C	冷卻	加熱
TP03500A	-55 to +200	Mechanical refrigeration, closed loop liquid cooling	電阻
TP03500D	+20 to +200	Open loop air cooling with Vortex*	電阻
TP03500E	+30 to +200	Open loop air cooling*	電阻

電壓 220V

* 用戶提供冷卻介質(zhì)